Aluminum Nitride Ceramic Substrates
Advantages of Aluminum Nitride include great thermal performance, low thermal expansion and non-toxicity.
Desirable properties of Aluminum Nitride as an electronic substrate:
- High thermal conductivity
- Low thermal expansion coefficient closely matching Silicon
- Good dielectric strength
- High electrical sensitivity
- Low toxicity and therefore excellent replacement for BeO
- Good shock and corrosion resistance
- Low dielectric loss
- High temperature stability
- High flexure strength
- Light weight
- Resistant to wafer processing gasses and plasma erosion
- Conducive to finishing operations such as lasering, lapping, and polishing
- Substrate for direct bond copper DBC and filled vias
- Good adhesion for thin and thick film applications
- Uniform lapped and polished surfaces for resistor networks
- Polished and lapped surface finishes to 1/2 micro-inch. Ra with minimum pullouts
- Lapped surface finishes to 6 micro-inch. Ra.
Properties -Typical
| Toxicity | Nontoxic |
| Density | 3.3 g/cm³ |
| Hardness (knoop) | 11.8 GPa |
| Moh's Hardness | 7 at 20°C |
| Flexure Strength | 290 MPa |
| Modulus of Elasticity | 331 GPa |
| Poisson's Ratio | 0.22 |
| Thermal Conductivity | 175 W/mk |
| Coefficient of Expansion | 4.6 x 10-6° (20 - 400°C) |
| Maximum Use Temperature | 800°C Oxidizing |
| Dielectric Constant | 20°C 8.9 at 1MHz |
| Dielectric Loss at 1MHz | 20°C0.0001 - 0.001 |
| Resistivity | >10E14 ohm-cm |
Additional Aluminum Nitride Information:
- www.aluminumnitride.com/polished Polished Aluminum Nitride AlN substrates and wafers
- www.quartz-silica.net AlN Aluminum Nitride chemical analysis
- www.valleydesign.com/substrate Aluminum Nitride AlN and Aluminum Oxide Ceramic substrates
- www.leoma.com Laser and Electro-Optical Manufactures Association
- www.acers.org American Ceramic Society
- www.edgepolishing.com/aluminum-nitride Aluminum Nitride mechanical and electrical properties
- www.laserslag.com/laser-drilling Laser drilling Aluminum Nitride and Alumina substrates
- www.customdicing.com Aluminum Nitride related information
- www.customdicing.com/wafer-dicing Wafer dicing, sawing, singulating and backgrinding
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